1

Deposition of Zr–ZrOX and Y–YXOY films by reactive magnetron sputtering

Year:
2005
Language:
english
File:
PDF, 231 KB
english, 2005
2

Synthesis of ZrO2/Y2O3 by combined arc and magnetron sputtering technique

Year:
2004
Language:
english
File:
PDF, 178 KB
english, 2004